Ultra-precision with interferoMETER measurements in the nanometer range


Optimized for industrial purposes and offering an accuracy that creates an unprecedented level of precision in optical distance and thickness measurements - these are the new white light interferometers from Micro-Epsilon. The portfolio comprises three different interferometer versions intended for different fields of applications. These systems achieve stable measurement results with resolutions in the subnanometer range.

With a resolution of < 30 picometers, the innovative interferoMETERs from Micro-Epsilon achieve a new level of precision in optical measurement technology. Depending on the application, three different versions are available. The IMS5400-DS for high precision and industrial distance measurements; the IMS5400-TH for precise thickness measurements; and the IMS5600-DS with vacuum-suitable design for distance measurements of subnanometer accuracy.

The high precision IMS5400-TH is used for the thickness measurement of thin transparent materials. The measurement is performed using just a single sensor regardless of the distance from the measurement object which tolerates fluttering or moving measurement objects. The near-infrared light source also enables thickness measurements of anti-reflective coated glass.

The IMS5400-DS is used for industrial distance measurements. The measuring system provides absolute measurement values and detects, for example, steps and edges reliably without signal loss. These compact and robust sensors can be integrated in restricted installation spaces.

The IMS5600-DS is designed for distance measurements in clean rooms and vacuum environments (up to UHV). Special controller calibration enables subnanometer resolution, which is required, for example, when aligning a sensor or positioning a stage.

The interferoMETERs consist of a controller, a sensor and a fiber optic cable. They are designed for industrial measurement tasks and so are equipped with a robust metal housing and highly flexible cables.

Numerous analog and digital interfaces such as Ethernet and EtherCAT enable easy connection. Configuration is performed via a user-friendly web interface for initial operation and parameter setting.

Micro-Epsilon Messtechnik
Königbacher Str. 15
94496 Ortenburg, Germany
+49 8542 / 168 - 0
+49 8542 / 168 - 90