interferoMETER: Powerful sensors for special requirements

2023-07-11

With the interferoMETER series, Micro-Epsilon offers innovative white light interferometers for industrial distance and thickness measurements with highest accuracy. In contrast to laser interferometers, absolute distance measurements can also be performed during signal jumps. Resolutions down to the picometer range are realized. Three new sensors are available for high-performance measurements in special environments. 

interferoMETER IMP-DS0.5/90/VAC90°

Distance sensor for small installation spaces
Measuring range 1.5 mm
Linearity ±10 nm (depending on controller)
Radial beam exit
Design for vacuum applications up to UHV

interferoMETER IMP-DS19/VAC(001)

Sensor with highest temperature stability
Measuring range 2.1 mm
Linearity ±10 nm (depending on controller)
Sensor material made of Invar
Design for vacuum applications up to UHV

interferoMETER IMP-DS1/VAC

Miniature distance sensor ø4 mm
Measuring range 1.1 mm
Linearity ±10 nm (depending on controller)
Integrated cable for easy installation
Design for vacuum applications up to UHV