3D sensor for the precise inspection of shiny surfaces

2021-09-15

The reflectCONTROL sensor detects flatness deviations below 1 µm and is used, for example, for 3D shape detection of wafers in semiconductor production and quality inspection of flat glass, e.g., in smartphone production.

This compact sensor generates a striped pattern which is mirrored by the surface of the measuring object into the sensor cameras. Deviations on the surface will cause distortions of this striped pattern, which are evaluated by software.

The reflectCONTROL sensor is used wherever high-precision 3D measurements must be performed on reflective and shiny surfaces. In particular, with flat surfaces, the reflectCONTROL technology impresses with its high measuring rates at micrometer accuracies. 

Why reflectCONTROL Sensor?

• Reliable detection of fine details < 1 µm
• Inspection rate < 2 seconds per measuring position
• Stationary or robot-based inspection
• Software integration via Micro-Epsilon’s 3D-SDK, based on industry standards
• GigE Vision and GenICam