Confocal sensors for displacement, distance, position and thickness


The confocal chromatic confocalDT measuring system is used for fast distance and thickness measurements. Different sensor models and controller interfaces open versatile fields of application, e.g., in the semiconductor industry, glass industry, medical engineering and plastics production.

  • Distance and thickness measurements with high resolution and measuring rate
  • Ideal for automation and production control
  • Almost surface-independent, also valid for mirrored and glass surfaces
  • Extremely small and constant spot size
  • Nanometer resolution
  • Industrial-grade controller with ideal signal-to-noise ratio
  • Passive measurement system

High precision displacement and distance measurement on practically all types of surfaces

The confocal chromatic measuring principle enables high precision displacement and distance measurements even on diffuse and reflecting surfaces. Very small objects can be detected due to the small measurement spot size. The axial beam path avoids shadowing effects, enabling measurements even in sleeves and recesses. With the 90° version, geometrical features can be measured inside holes and recesses.

Adjustable mounting adapter for sensor alignment

To achieve maximum accuracy, the confocal sensors must be aligned as perpendicular as possible to the measuring object. The adjustable mounting adapter is used to optimally align all confocalDT sensors to the target. You can also align the sensor after the installation in the machine. The industrial adapter allows the displacement in the x- and y-axes as well as tilting the sensor to the measuring object.

New: Adjustable mounting adapter for two-sided thickness measurement

The JMA-Thickness consists of two adjustable mounting adapters, and supports the alignment of sensors in two-sided thickness measurements. This means that the measuring points can be arranged absolutely congruent on an optical axis, which ensures reliable thickness measurements with highest precision. The JMA-Thickness is ideal for the integration into machines and production plants. The preassembled mounting plates allow quick and easy installation.

One-sided thickness measurement of transparent materials

The confocal chromatic measuring principle enables thickness measurements of transparent materials such as glass. The thickness value is detected to micrometer accuracy using only a single sensor. The controller provides an editable, expandable materials database. Material-specific parameters such as refractive indexes can be adapted using the web interface. Multi-peak measurements enable the evaluation of up to 6 peaks, which is how multi-layer objects such as laminated glass can be measured.

Vacuum applications

The confocalDT sensors consist of passive components and do not give off heat. Particularly for use in vacuum applications, Micro-Epsilon offers sensors, cables and accessories which are suitable for the respective specification (clean room, vacuum ultra-high vacuum UHV). Vacuum compatible sensors are currently available with measuring ranges of 2.5 mm, 3 mm, 10 mm and 28 mm. The IFS2406-2,5 sensor is available with either axial or radial beam path.

High measuring rate for dynamic measurement tasks

With high measuring rates, it is important to adapt the exposure to the respective surface. Therefore, the confocalDT controller dynamically regulates the exposure of the CCD line. This exposure control compensates for color and reflectivity changes of the measuring object in order to increase the measurement accuracy at high measuring rates.

Ultra-small light spot detects finest details and structures

Confocal sensors from Micro-Epsilon generate the smallest of light spots <3 µm due to their high Numerical aperture (NA). Therefore, the finest details and structures can be detected reliably.

Extremely large tilt angle

The confocalDT IFS sensors tolerate a large tilt angle up to 48°. Therefore curved and structured surfaces can be detected reliably to generate stable signals.

Controllers with high resolutions and high speeds

The confocalDT controllers provide an excellent signal-to-noise ratio enabling measurements at high accuracy. They are among the fastest controllers worldwide and are frequently used for dynamic monitoring tasks. The fast surface compensation regulates the exposure cycles in order to achieve high signal stability which is particularly favorable when measuring surfaces with varying reflection characteristics. Interfaces are RS422, Ethernet or EtherCAT and AnalogOut.

Ease of use via web interface

Due to a user-friendly web interface, the entire configuration process is carried out without using any additional software. The web interface can be accessed via Ethernet and provides set up and configuration options. Materials are stored in an expandable materials database.

Multiple interfaces for easy integration

Analog RS422 Ethernet Ethercat Profinet EthernetIP

Micro-Epsilon Messtechnik
Königbacher Str. 15
94496 Ortenburg, Germany
+49 8542 / 168 - 0
+49 8542 / 168 - 90